Exploring the fabrication and transfer mechanism of metallic nanostructures on carbon nanomembranes via focused electron beam induced processing

• Christian Preischl,
• Linh Hoang Le,
• Elif Bilgilisoy,
• Armin Gölzhäuser and
• Hubertus Marbach

Beilstein J. Nanotechnol. 2021, 12, 319–329, doi:10.3762/bjnano.12.26

• satisfying results [4][9]. However, for certain precursors, EBID yields clean deposits when carried out under ultrahigh vacuum (UHV) conditions. It was shown that in UHV, for some precursors, an autocatalytic growth (AG) process occurs already at room temperature, which leads, upon further precursor dosage

• experiments followed by autocatalytic growth on a TPT SAM on Ag(111)/mica. All structures were written with Ebeam = 15 kV and Ibeam = 400 pA. (a) SEM image of a 2 × 2 µm2 deposit fabricated via EBID + AG with Fe(CO)5 (1.04 C/cm2 and tAG = 3 h 44 min). (b) SEM image of a 2 × 2 µm2 deposit fabricated via EBISA

• and tAG = 4 h 3 min). (f) Local AE spectra recorded at the positions indicated with correspondingly colored stars. Results of time-dependent EBISA experiments followed by autocatalytic growth on a TPT SAM on Ag(111)/mica. All structures were written with Ebeam = 15 kV, Ibeam = 3 nA, and the same tAG

Chemistry for electron-induced nanofabrication

• Petra Swiderek,
• Hubertus Marbach and
• Cornelis W. Hagen

Beilstein J. Nanotechnol. 2018, 9, 1317–1320, doi:10.3762/bjnano.9.124

• force microscopy [32] as well as nanostructures fabricated by a combination of FEBID and autocatalytic growth processes and used as templates for the growth of carbon nanotubes [33]. In summary, the publications collected in the Thematic Series at hand document significant progress in the understanding

Gas-assisted silver deposition with a focused electron beam

• Luisa Berger,
• Katarzyna Madajska,
• Iwona B. Szymanska,
• Katja Höflich,
• Mikhail N. Polyakov,
• Jakub Jurczyk,
• Carlos Guerra-Nuñez and
• Ivo Utke

Beilstein J. Nanotechnol. 2018, 9, 224–232, doi:10.3762/bjnano.9.24

• poisoned crystal surfaces which could not be exactly verified in the scope of this work. However, autocatalytic growth as known for other FEBID precursors [19][20][21], i.e., continued growth without electron beam exposure, could be experimentally disproven (Supporting Information File 1). Figure 3 shows

• profile, the radial BSE distribution and autocatalytic growth behavior. Acknowledgements The authors acknowledge financial support from the EU COST action CM1301 “CELINA” and the SNF funding under the project 200021E-164211.

Localized growth of carbon nanotubes via lithographic fabrication of metallic deposits

• Fan Tu,
• Martin Drost,
• Imre Szenti,
• Janos Kiss,
• Zoltan Kónya and
• Hubertus Marbach

Beilstein J. Nanotechnol. 2017, 8, 2592–2605, doi:10.3762/bjnano.8.260

• morphology, for example, as individual nanotubes or as CNT forests. Electron beam induced deposition (EBID) with subsequent autocatalytic growth (AG) was applied to lithographically produce catalytically active seeds for the localized growth of CNTs via chemical vapor deposition (CVD). With the precursor Fe

• though the metal content (Co) of the latter is reduced in comparison to the Fe deposits, effective CNT growth was observed for the Co-containing deposits at lower CVD temperatures than for the corresponding Fe deposits. Keywords: autocatalytic growth; carbon nanotubes; cobalt tricarbonyl nitrosyl

• -high-vacuum (UHV) environment, we are able to fabricate clean metallic deposits, in particular, from the precursor Fe(CO)5 [22][23][24][25][26][27]. In the present work, Fe nanostructures fabricated via EBID and autocatalytic growth (AG) with the precursor Fe(CO)5 in an UHV instrument were used as

The impact of the confinement of reactants on the metal distribution in bimetallic nanoparticles synthesized in reverse micelles

• Concha Tojo,
• Elena González and
• Nuria Vila-Romeu

Beilstein J. Nanotechnol. 2014, 5, 1966–1979, doi:10.3762/bjnano.5.206

• in the model the well-known belief that a bigger surface (bigger particle) has a greater probability to act as a catalyst. In this way, the growth of a preexistent nucleus is favored instead of the formation of a new one. To simplify, autocatalytic growth is governed by particle size, without taking

Electron-beam induced deposition and autocatalytic decomposition of Co(CO)₃NO

• Florian Vollnhals,
• Martin Drost,
• Fan Tu,
• Esther Carrasco,
• Andreas Späth,
• Rainer H. Fink,
• Hans-Peter Steinrück and
• Hubertus Marbach

Beilstein J. Nanotechnol. 2014, 5, 1175–1185, doi:10.3762/bjnano.5.129

• Erlangen, Germany 10.3762/bjnano.5.129 Abstract The autocatalytic growth of arbitrarily shaped nanostructures fabricated by electron beam-induced deposition (EBID) and electron beam-induced surface activation (EBISA) is studied for two precursors: iron pentacarbonyl, Fe(CO)5, and cobalt tricarbonyl

• results obtained from Fe(CO)5. Co(CO)3NO exhibits autocatalytic growth on Co-containing seed layers prepared by EBID using the same precursor. The growth yields granular, oxygen-, carbon- and nitrogen-containing deposits. In contrast to Fe(CO)5 no decomposition on electron beam-activated surfaces is

• observed. In addition, we show that the autocatalytic growth of nanostructures from Co(CO)3NO can also be initiated by an Fe seed layer, which presents a novel approach to the fabrication of layered nanostructures. Keywords: autocatalytic growth; cobalt tricarbonyl nitrosyl; electron-beam induced

Focused electron beam induced deposition: A perspective

• Michael Huth,
• Fabrizio Porrati,
• Christian Schwalb,
• Marcel Winhold,
• Roland Sachser,
• Maja Dukic,
• Jonathan Adams and
• Georg Fantner

Beilstein J. Nanotechnol. 2012, 3, 597–619, doi:10.3762/bjnano.3.70

Spontaneous dissociation of Co₂(CO)₈ and autocatalytic growth of Co on SiO₂: A combined experimental and theoretical investigation

• Kaliappan Muthukumar,
• Harald O. Jeschke,
• Roser Valentí,
• Evgeniya Begun,
• Johannes Schwenk,
• Fabrizio Porrati and
• Michael Huth

Beilstein J. Nanotechnol. 2012, 3, 546–555, doi:10.3762/bjnano.3.63